Items tagged with SEM Files

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Traceable calibration and uncertainty of measurements in scanning electron microscopy NT TR 252

NT TR 252

  • The objective of this study was to develop guidelines for measuring quantitative chemical compositions and dimensions in scanning electron microscopy (SEM) to a predetermined level of uncertainty with the help of the new publication ISO/TAG4/WG 3 (June 1992): Guide to the Expression of Uncertainty in Measurement.

    A literature survey was made in order to see what relevant standards or recognised procedures are available for measurements in SEM.

    This report containes worked examples of uncertainty analysis and application of the ISO/TAG4/WG 3 guide for measurements in SEM. The results of experiments and the literature survey are summarised and the suitability of the ISO/TAG4/WG 3 guide is discussed.

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